Probability of a defined charged or neutral species being produced, by consumption of a defined parent atomic or molecular configuration at a surface, as a result of sputtering in
secondary ion mass spectrometry.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1846 (https://doi.org/10.1515/pac-2019-0404)