secondary-ion energy distribution

https://doi.org/10.1351/goldbook.09425
Number of secondary ions as a function of kinetic energy at a specified collection angle.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1844 (https://doi.org/10.1515/pac-2019-0404)