Measured response of the energy filtering and detection system as a consequence of bombarding the sample material with an
ion beam, usually presented as the ordinate of an
ion-scattering spectrum.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1833 (https://doi.org/10.1515/pac-2019-0404)