Electron or ion optical method of steering a spectrometer axis to align with the impact area of the primary beam at all points of a
raster scan on the sample surface.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1823 (https://doi.org/10.1515/pac-2019-0404)