Inelastic scattering of electrons in solids that produces a non-uniform energy loss spectrum determined by the characteristics of the material.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1822 (https://doi.org/10.1515/pac-2019-0404)