Title: backscattering correction factor
Long Title: IUPAC Gold Book - backscattering correction factor
DOI: 10.1351/goldbook.09312
Status: current

Definition
In Auger electron spectroscopy, factor equal to the total Auger-electron current arising from ionizations in the sample caused by both primary electrons and backscattered electrons divided by the Auger-electron current arising directly from the primary electrons.

Note
‘Backscattering correction factor’ is preferred to the contraction ‘backscattering factor’.

Related Terms
- Auger electron spectroscopy: https://goldbook.iupac.org//terms/view/09172
- backscattered electrons: https://goldbook.iupac.org//terms/view/09311

Source
- PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1821 (https://doi.org/10.1515/pac-2019-0404)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09312/html
- json: https://goldbook.iupac.org/terms/view/09312/json
- xml: https://goldbook.iupac.org/terms/view/09312/xml

Citation: Citation: 'backscattering correction factor' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09312
License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms.
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Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-08-10T02:48:52+00:00