{"term":{"id":"09289","title":"steady-state sputtering","longtitle":"IUPAC Gold Book - steady-state sputtering","doi":"10.1351\/goldbook.09289","code":"09289","status":"current","definitions":[{"id":1,"text":"State of the sputtering process in which important operational and analytical parameters are unchanging over a meaningful timescale.","notes":{"1":"Generally, steady state and stoichiometric sputtering are equivalent but, in profiling dilute delta layers in semiconductors, for example, the sputtering can be at a steady state while the constituents being studied are not being sputtered in their stoichiometric ratio."},"links":[{"term":"delta layers","url":"https:\/\/goldbook.iupac.org\/\/terms\/view\/09243"},{"term":"stoichiometric sputtering","url":"https:\/\/goldbook.iupac.org\/\/terms\/view\/09291"}],"sources":["PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1814 (https:\/\/doi.org\/10.1515\/pac-2019-0404)"]}],"altoutputs":{"html":"https:\/\/goldbook.iupac.org\/terms\/view\/09289\/html","xml":"https:\/\/goldbook.iupac.org\/terms\/view\/09289\/xml","plain":"https:\/\/goldbook.iupac.org\/terms\/view\/09289\/plain"},"citation":"Citation: 'steady-state sputtering' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351\/goldbook.09289","license":"The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https:\/\/creativecommons.org\/licenses\/by-sa\/4.0\/) for individual terms.","collection":"If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org .","disclaimer":"The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.","accessed":"2026-04-20T22:02:10+00:00"}}