redeposition

https://doi.org/10.1351/goldbook.09275
Deposition of sputtered sample material back onto the sample surface.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1811 (https://doi.org/10.1515/pac-2019-0404)