range straggling

https://doi.org/10.1351/goldbook.09273

Standard deviation of the projected ranges of energetic ions or atoms of a given energy.

Note: Used in energetic-ion analysis, Rutherford backscattering spectrometry, and secondary-ion mass spectrometry.

Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1810 (https://doi.org/10.1515/pac-2019-0404)