Distance from the surface at which an energetic ion or atom comes to rest in the sample, projected along the direction of the beam.
See also: range straggling
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1810 (https://doi.org/10.1515/pac-2019-0404)