Three-dimensional representation of the spatial distribution of a particular elemental or molecular species, as indicated by emitted
secondary ions or electrons, as a function of depth or material removed by sputtering.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1805 (https://doi.org/10.1515/pac-2019-0404)