Title: image depth profile
Long Title: IUPAC Gold Book - image depth profile
DOI: 10.1351/goldbook.09254
Status: current

Definition
Three-dimensional representation of the spatial distribution of a particular elemental or molecular species, as indicated by emitted secondary ions or electrons, as a function of depth or material removed by sputtering.

Related Term
- secondary ions: https://goldbook.iupac.org//terms/view/09422

Source
- PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1805 (https://doi.org/10.1515/pac-2019-0404)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09254/html
- json: https://goldbook.iupac.org/terms/view/09254/json
- xml: https://goldbook.iupac.org/terms/view/09254/xml

Citation: Citation: 'image depth profile' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09254
License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms.
Collection: If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org .
Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-07-26T18:32:46+00:00