09249 IUPAC Gold Book - erosion rate 10.1351/goldbook.09249 09249 current 1 Change in the position of the surface as a result of particle or photon irradiation divided by time of irradiation. Erosion rate can be deduced from surface profilometer measurements of a crater after analysis. In this case, the effects of the altered layer and post-profile oxidation need to be considered. Where the erosion is caused by sputtering, initially the erosion rate can be less than the sputtering rate as a result of the retention of sputtering particles. The rate can be measured as a velocity. sputtering rate https://goldbook.iupac.org//terms/view/09286 PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1803 (https://doi.org/10.1515/pac-2019-0404) https://goldbook.iupac.org/terms/view/09249/html https://goldbook.iupac.org/terms/view/09249/json https://goldbook.iupac.org/terms/view/09249/plain Citation: 'erosion rate' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09249 The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. 2026-06-04T21:28:37+00:00