Title: delta layer Long Title: IUPAC Gold Book - delta layer DOI: 10.1351/goldbook.09243 Status: current Definition Layer of discrete composition, one atom thick, formed during the growth of material on a substrate. Note These films are often formed during epitaxial growth on single-crystal substrates. Source - PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1802 (https://doi.org/10.1515/pac-2019-0404) Other Outputs - html: https://goldbook.iupac.org/terms/view/09243/html - json: https://goldbook.iupac.org/terms/view/09243/json - xml: https://goldbook.iupac.org/terms/view/09243/xml Citation: Citation: 'delta layer' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09243 License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. Collection: If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. Accessed: 2026-04-20T23:32:52+00:00