Diffusion-like process in which atoms of material are moved randomly by energy deposited by incident particles slowing down in the sample surface region.
See also: collision cascade, atomic mixing
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1800 (https://doi.org/10.1515/pac-2019-0404)