Measurement method for the thickness of transparent surface films and layers and for the refractive index of a reflecting material.
Notes: - Radiation that is linearly polarized oblique to the surface becomes elliptically polarized after reflection at non-normal incidence. The ellipticity is obtained from measurements of the intensity and polarization of the incident and the reflected radiation.
- Ellipsometry may utilise monochromatic light, while spectroscopic ellipsometry employs a range of frequencies.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1790 (https://doi.org/10.1515/pac-2019-0404)