09192 IUPAC Gold Book - secondary-ion mass spectrometry 10.1351/goldbook.09192 09192 current acronym: SIMS 1 Measurement method in which a focused beam of primary ions produces secondary ions by sputtering from a solid surface. The secondary ions are analysed by mass spectrometry. SIMS is, by convention, generally classified as either dynamic, in which the material surface layers are continually removed as they are being measured, or static, in which the ion areic dose during measurement is restricted to less than \(\pu{E16}\) ions \(\pu{m2}\) in order to retain the surface in an essentially undamaged state. dynamic secondary-ion mass spectrometry https://goldbook.iupac.org//terms/view/09183 static secondary-ion mass spectrometry https://goldbook.iupac.org//terms/view/09193 PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1789 (https://doi.org/10.1515/pac-2019-0404) https://goldbook.iupac.org/terms/view/09192/html https://goldbook.iupac.org/terms/view/09192/json https://goldbook.iupac.org/terms/view/09192/plain Citation: 'secondary-ion mass spectrometry' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09192 The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. 2026-07-25T15:48:17+00:00