Secondary-ion mass spectrometry analysis with primary ion current density sufficiently high for use in the analysis of sample surface layers in the depth direction.
Note: Dynamic SIMS is often simply termed SIMS.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1786 (https://doi.org/10.1515/pac-2019-0404)