Measurement method to elucidate composition and structure of the outermost atomic layers of a solid material, in which principally monoenergetic neutral atoms or singly charged
probe ions are used to sputter atoms or ions out of the solid surface, their energy being recorded at one or more angle of scattering.
Notes: - In the analysis, it is assumed that the recoiled atom or ion is from a single binary elastic scattering event. The energy is the complement of the primary ion scattered ion energy.
- The scattered primary ions can be removed from the spectrum by a suitable choice of angle of scattering.
- This method is often combined with rutherford backscattering spectrometry, as they share many concepts and instrumental items.
See also: Rutherford backscattering spectrometry
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1784 (https://doi.org/10.1515/pac-2019-0404)