@article{IUPAC+09565+2025,
url = {https://doi.org/10.1351/goldbook.09565},
institution = {International Union of Pure and Applied Chemistry (IUPAC)},
year = {2025},
title = {chemically amplified resist},
doi = {doi:10.1351/goldbook.09565},
edition = {5.0.0}
}