@article{IUPAC+09290+2025,
url = {https://doi.org/10.1351/goldbook.09290},
institution = {International Union of Pure and Applied Chemistry (IUPAC)},
year = {2025},
title = {steady-state surface composition sputtering},
doi = {doi:10.1351/goldbook.09290},
edition = {5.0.0}
}